Chemcut equipment is an excellent choice for non-traditional processing of semiconductor products. Typical applications for our systems include the following:
- Aqueous resist developing
- Aqueous resist stripping
- Etching silicon
- Etching metallic layers
Chemcut’s continuous horizontal conveyor system allows for parallel processing of multiple pieces and can transport wafers, disks, squares, rectangles and irregular shapes. The standard conveyor requires a minimum piece size of 5X6 inches; however, depending upon the processes needed, conveyor options may be available to accommodate smaller materials.
We manufacture systems with useable conveyor widths from 15-60 inches, and a variety of machine lengths are available to match the required throughput rate. Non-metallic and premium metal construction components insure compatibility with a width range of aqueous process solutions, including hydrofluoric acid. All equipment is built with fire retardant materials and applicable to SEMI specifications. Optional materials are available for Class 100 clean rooms.